Title :
A RF-MEMS switchable CPW air-bridge
Author :
Contreras, Adrian ; Casals-Terre, Jasmina ; Pradell, Lluis ; Giacomozzi, Flavio ; Colpo, Sabrina ; Iannacci, J. ; Ribo, Miquel
Author_Institution :
Signal Theor. & Commun. Dept., Tech. Univ. of Catalonia (UPC), Barcelona, Spain
Abstract :
This work presents a new shunt-type ohmic contact RF-MEMS switch specifically designed as a switchable CPW air bridge. The switch can be used in coplanar waveguide (CPW) reconfigurable multimodal circuits, for a selective use of the CPW odd-mode. The bridge is anchored using folded-beam suspensions, in such a way that two points at each end of the bridge remain free to contact the ground planes of the CPW. The suspension has been designed to compensate stress gradients effects and to lower actuation voltage. In the actuated (ON) state, the switch isolation to the odd mode is better than 20dB up to 8GHz and 10dB up to 30GHz.
Keywords :
coplanar waveguides; microswitches; microwave switches; coplanar waveguide reconfigurable multimodal circuits; frequency 30 GHz; frequency 8 GHz; shunt type ohmic contact RF-MEMS switch; switchable CPW air bridge; Bridge circuits; Coplanar waveguides; Fabrication; Gold; Optical switches; Stress; RF MEMS switch; coplanar waveguide; multimodal circuit;
Conference_Titel :
Microwave Integrated Circuits Conference (EuMIC), 2012 7th European
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4673-2302-4
Electronic_ISBN :
978-2-87487-026-2
