Title :
Dielectric less and dimple less MEMS capacitive switches: The actuation mechanism
Author :
Michalas, L. ; Koutsoureli, M. ; Papaioannou, G.J. ; Stavrinidis, G. ; Konstantinidis, G.
Author_Institution :
Phys. Dept., Univ. of Athens, Athens, Greece
Abstract :
The present paper investigates for the first time the electrical properties of dielectric less and dimple less MEMS capacitive switches. The capacitance of these devices increases rapidly beyond pull-in being proportional to the Fowler-Nordhein current-voltage relation. The study is carried out through experimentally obtained capacitance- and current-voltage characteristic that agree with the corresponding capacitance and field emission current models.
Keywords :
field emission; microswitches; Fowler-Nordhein current voltage relation; actuation mechanism; dielectric less MEMS capacitive switches; dimple less MEMS capacitive switches; field emission current models; Bridge circuits; Capacitance; Dielectrics; Electric fields; Electrodes; Micromechanical devices; Radio frequency; Fowler-Nordheim current; MEMS capacitive switch; dielectric less device;
Conference_Titel :
Microwave Integrated Circuits Conference (EuMIC), 2012 7th European
Conference_Location :
Amsterdam
Print_ISBN :
978-1-4673-2302-4
Electronic_ISBN :
978-2-87487-026-2
