Low actuation voltage RF MEMS switches with signal frequencies from 0.25 GHz to 40 GHz

A novel low-voltage radio-frequency microelectromechanical system (RF MEMS) switch is reported. The device switching voltages are 14-17 volts. When the device is operated in an ´on´ state, an insertion loss of less than 0.5 dB with a return loss of -15 dB at 40 GHz was measured. When operated in its ´off´ state, an isolation of better than 27 dB over the frequency band from 0.25 GHz to 40 GHz was achieved. The RF MEMS switch equivalent circuit model shows that the ´on´ resistance is 0.3 /spl Omega/ and the ´off´ capacitance is 90 fF, which results in a figure of merit of 6000 GHz.