DocumentCode
1645229
Title
Reducing static related defects and controller problems in semiconductor production automation equipment
Author
Rush, John ; Steinman, Arnold
Author_Institution
Fortrend Eng., Sunnyvale, CA, USA
fYear
1994
Firstpage
95
Lastpage
99
Abstract
The trend toward automated manufacturing increases the importance of controlling static charge to eliminate ESD and contamination within equipment. This paper discusses problems, sources and control methods for static charge. It examines methods used to control static charges in semiconductor production tools. Application of air ionizers in production automation are presented
Keywords
electrostatic discharge; ESD; air ionizers; contamination; controller; defects; manufacturing; semiconductor production automation equipment; static charge; Automatic control; Contamination; Control systems; Electrostatic discharge; Lithography; Manufacturing automation; Microprocessors; Particle production; Robotics and automation; Surface charging;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI
Conference_Location
Cambridge, MA
Print_ISBN
0-7803-2053-0
Type
conf
DOI
10.1109/ASMC.1994.588206
Filename
588206
Link To Document