Title :
Reducing static related defects and controller problems in semiconductor production automation equipment
Author :
Rush, John ; Steinman, Arnold
Author_Institution :
Fortrend Eng., Sunnyvale, CA, USA
Abstract :
The trend toward automated manufacturing increases the importance of controlling static charge to eliminate ESD and contamination within equipment. This paper discusses problems, sources and control methods for static charge. It examines methods used to control static charges in semiconductor production tools. Application of air ionizers in production automation are presented
Keywords :
electrostatic discharge; ESD; air ionizers; contamination; controller; defects; manufacturing; semiconductor production automation equipment; static charge; Automatic control; Contamination; Control systems; Electrostatic discharge; Lithography; Manufacturing automation; Microprocessors; Particle production; Robotics and automation; Surface charging;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-2053-0
DOI :
10.1109/ASMC.1994.588206
