Title :
Realization of a 150 GHz to 450 GHz tripler circuit based on a thin dielectric HMDS-N-membrane
Author :
Duwe, K. ; Muller, J.
Author_Institution :
Dept. of Microsystems-Technol., Technische Univ. Hamburg-Harburg, Hamburg, Germany
Abstract :
The realization of a 150 GHz to 450 GHz tripler circuit based on a thin dielectric HMDS-N membrane is described. The design requires an integration of a GaAs-based heterostructure barrier varactor on a passive feeding structure based on a thin dielectric membrane, which is realized by thermocompression bonding. First measurements show sufficient output power and efficiencies.
Keywords :
III-V semiconductors; dielectric thin films; frequency multipliers; gallium arsenide; membranes; millimetre wave frequency convertors; polymer films; varactors; 150 to 450 GHz; GaAs; GaAs heterostructure barrier varactor; dielectric HMDS-N membrane; frequency tripler circuit; passive feeding structure; thermocompression bonding; Annealing; Biomembranes; Circuits; Coplanar waveguides; Dielectric substrates; Frequency; Plasma density; Polymers; Rectangular waveguides; Waveguide transitions;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1212481
