• DocumentCode
    1646273
  • Title

    Laser fabrication of non-tapered deep micro holes: Strategies and working tools

  • Author

    Ashkenasi, David ; Müller, Norbert ; Lemke, Andreas ; Kaszemeikat, Tristan ; Schmidt, Matthias ; Jahns, Daniel ; Eichler, Hans Joachim

  • Author_Institution
    Angewandte Lasertech., Laser - und Medizin-Technol. Berlin, Berlin, Germany
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The implementation of laser processing strategies and working tools for micro cylindrical drilling at high aspect ratio is demonstrated for glasses, ceramics and metals. Laser parameters vary in wavelength, pulse width and pulse energy.
  • Keywords
    aluminium compounds; ceramics; drilling; glass; laser beam machining; laser materials processing; metals; micro-optics; optical fabrication; tools; AlN; aspect ratio; ceramics; glasses; laser fabrication; laser processing; metals; microcylindrical drilling; nontapered deep microholes; pulse energy; pulse width; Ceramics; Laser beam cutting; Laser beams; Optics; Semiconductor lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325386
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1646273