Title :
Batch encapsulation technique for CMOS based chemical sensors
Author :
Prodromakis, T. ; Georgiou, P. ; Constandinou, T.G. ; Michelakis, K. ; Toumazou, C.
Author_Institution :
Inst. of Biomed. Eng., Imperial Coll. London, London
Abstract :
This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step.
Keywords :
CMOS integrated circuits; biomedical electronics; biomedical materials; biosensors; chemical sensors; encapsulation; photoresists; polymers; CMOS; SU-8 photoresist; batch encapsulation; chemical sensors; photolithography; sensing membrane; Biological materials; Biomedical engineering; Biomembranes; Biosensors; CMOS technology; Chemical and biological sensors; Chemical sensors; Chemical transducers; Encapsulation; Resists; CMOS; ISFET; SU-8 photoresist; chemical sensor; encapsulation;
Conference_Titel :
Biomedical Circuits and Systems Conference, 2008. BioCAS 2008. IEEE
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4244-2878-6
Electronic_ISBN :
978-1-4244-2879-3
DOI :
10.1109/BIOCAS.2008.4696939
