• DocumentCode
    1646276
  • Title

    Batch encapsulation technique for CMOS based chemical sensors

  • Author

    Prodromakis, T. ; Georgiou, P. ; Constandinou, T.G. ; Michelakis, K. ; Toumazou, C.

  • Author_Institution
    Inst. of Biomed. Eng., Imperial Coll. London, London
  • fYear
    2008
  • Firstpage
    321
  • Lastpage
    324
  • Abstract
    This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step.
  • Keywords
    CMOS integrated circuits; biomedical electronics; biomedical materials; biosensors; chemical sensors; encapsulation; photoresists; polymers; CMOS; SU-8 photoresist; batch encapsulation; chemical sensors; photolithography; sensing membrane; Biological materials; Biomedical engineering; Biomembranes; Biosensors; CMOS technology; Chemical and biological sensors; Chemical sensors; Chemical transducers; Encapsulation; Resists; CMOS; ISFET; SU-8 photoresist; chemical sensor; encapsulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Biomedical Circuits and Systems Conference, 2008. BioCAS 2008. IEEE
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4244-2878-6
  • Electronic_ISBN
    978-1-4244-2879-3
  • Type

    conf

  • DOI
    10.1109/BIOCAS.2008.4696939
  • Filename
    4696939
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1646276