• DocumentCode
    1646423
  • Title

    Solid-immersion-lens-enhanced nonlinear frequency-variation mapping of a silicon integrated-circuit

  • Author

    Serrels, K.A. ; Farrell, C. ; Lundquist, T.R. ; Reid, D.T. ; Vedagarbha, P.

  • Author_Institution
    DCG Syst. Inc., Fremont, CA, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    By inducing two-photon absorption within the active layer of a proprietary silicon test chip, we demonstrate solid-immersion-lens-enhanced nonlinear frequency-variation mapping of a 500-MHz ring oscillator circuit.
  • Keywords
    failure analysis; integrated circuit testing; lenses; optical microscopy; oscillators; silicon; Si; frequency 500 MHz; nonlinear frequency-variation mapping; optoelectronic microscopy; ring oscillator circuit; silicon integrated-circuit; silicon test chip; solid-immersion-lens; two-photon absorption; Frequency measurement; Measurement by laser beam; Microscopy; Ring lasers; Ring oscillators; Silicon; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325391
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1646423