Kinetics parameters studies of Co-Fe-B deposits using multiple regression

A mathematics model based on multiple linear regression (MLR) for the deposition rate of the electroless Co-Fe-B thin film was established. The plating rate of electroless Co-Fe-B deposits is a function of concentration of sodium tetrahydroborate, pH of the plating bath, plating temperature and the metallic ratio. The correlation of deposition rate and the solution concentration and pH value shown in experimental data was described by residual variance S. The estimated regression coefficient b_0-3, confidence interval, residual error r and confidence interval r_int were ascertained by computer program. The best kinetics equation of deposition rate was derived. The optimal composition of the plating bath was obtained according to experimental results and reaction kinetics equation. In this paper, all kinds of complexing agent and linear regression analysis ware adopted so as to optimize experimental project. Meanwhile, the optimal composition of the plating solution and operating conditions ware obtained, and Co-Fe-B alloy thin film of good quality was fully produced.