Title :
Tabletop reflection mode coherent diffractive imaging of periodic nano-structures with 100 nm resolution
Author :
Seaberg, Matthew D. ; Adams, Daniel E. ; Zhang, Bosheng ; Murnane, Margaret M. ; Kapteyn, Henry C.
Author_Institution :
Dept. of Phys., Univ. of Colorado, Boulder, CO, USA
Abstract :
We report the first reflection-mode coherent diffraction imaging using a tabletop short wavelength light source. A novel imaging scheme can probe metalic nano-pillar arrays with ~100 nm resolution.
Keywords :
light diffraction; light reflection; mirrors; nanostructured materials; optical images; optical instruments; optical microscopy; optical multilayers; periodic structures; metalic nanopillar arrays; novel imaging; periodic nanostructure; short wavelength light source; tabletop reflection mode coherent diffractive imaging; Diffraction; Imaging; Reflection; Spatial resolution; Surface waves; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
