Title :
Design and characterization of integrated passive elements on high ohmic silicon
Author :
Valletta, E. ; Van Beek, J. ; Den Dekker, A. ; Pulsford, N. ; Jos, H.F.F. ; de Vreede, L.C.N. ; Nanver, L.K. ; Burghartz, J.N.
Author_Institution :
Dept. of Inf., Technol. & Syst., Delft Univ. of Technol., Netherlands
Abstract :
This work presents ultra low-loss coplanar waveguides and Marchand type baluns implemented in an optimized high ohmic silicon substrate technology for RF/microwave applications. The CPW configured baluns operate from 15 to 25 GHz with a minimum insertion loss of 0.8 dB at center frequency.
Keywords :
MMIC; S-parameters; baluns; coplanar waveguides; two-port networks; 0.8 dB; 15 to 25 GHz; 2-port S-parameters; 3-port S-parameters; CPW configured baluns; Marchand type baluns; RF/microwave applications; Si; back-to-back balun configuration; in-house custom DIMES process; integrated passive elements; minimum insertion loss; optimized high ohmic Si substrate technology; ultra low-loss coplanar waveguides; Coplanar transmission lines; Coplanar waveguides; Distributed parameter circuits; Impedance matching; Microwave technology; Millimeter wave technology; Radio frequency; Silicon; Substrates; Transmission line theory;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1212592
