1650708

Micromachined Silicon Microprobes For Cns Recording And Stimulation

Wise, K.D. ; Najafi, K. ; Ji, J. ; Hetke, J.F. ; Tanghe, S.J. ; Hoogerwerf, A. ; Anderson, D.J. ; BeMent, S.L. ; Ghazzi, M. ; Baer, W. ; Hull, T. ; Yang, Y.

University of Michigan

1990

2334

2335

Built-in self-test; Circuits; Conductors; Dielectric substrates; Geometry; Impedance; Microelectrodes; Probes; Shape control; Silicon;

English

ieee

Engineering in Medicine and Biology Society, 1990., Proceedings of the Twelfth Annual International Conference of the IEEE

0-87942-559-8

conf

10.1109/IEMBS.1990.692311

692311