Title :
Characterization of PZT Thin Films by Sol-Gel Method in Application of Resonant Sensor
Author :
Tsai, J.Z. ; Chen, C.J. ; Hsiao, C.W. ; Hsieh, D.T. ; Hsin, Y.M.
Author_Institution :
Dept. of Electr. Eng., Nat. Central Univ., Jhongli
Abstract :
Micrometer-scale piezoelectric PZT sensors for gravimetric applications were developed. The PZT thin films were fabricated with sol-gel PZT and were of 400 times 400 mum2 working area. Optical microscopy, scanning electron microscopy, leakage current density analysis, and C-V characterization were employed to evaluate the structure as well as successfulness of the microfabrication process. A resonance measurement circuit, which transformed the resonance frequency signal to a DC level, was built to characterize the gravimetric ability of the PZT sensors. Change of mass on the PZT sensor can be detected by observing the DC shift at the output of the detection circuit.
Keywords :
biosensors; density measurement; lead compounds; microsensors; optical microscopy; piezoelectric devices; proteins; scanning electron microscopy; sol-gel processing; thin film sensors; weighing; C-V characterization; DC shift; PZT; gravimetric applications; leakage current density analysis; microfabrication process; micrometer-scale piezoelectric sensors; optical microscopy; protein sensing; resonance measurement circuit; resonant sensor; scanning electron microscopy; sol-gel method; thin film characterization; thin film sensors; Electron optics; Optical films; Optical microscopy; Optical sensors; Piezoelectric films; Resonance; Scanning electron microscopy; Sensor phenomena and characterization; Thin film circuits; Thin film sensors;
Conference_Titel :
Bioinformatics and Biomedical Engineering, 2008. ICBBE 2008. The 2nd International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1747-6
Electronic_ISBN :
978-1-4244-1748-3
DOI :
10.1109/ICBBE.2008.53
