Title :
Industry study on issues of MEMS reliability and accelerated lifetime testing
Author_Institution :
MEMS Ind. Group, Pittsburgh, PA, USA
Keywords :
electronic equipment testing; failure analysis; life testing; micromechanical devices; reliability; MEMS Industry Group; MEMS reliability; accelerated lifetime testing; failure investigation; micro-electro-mechanical system devices; product lifetime; Accelerated aging; Actuators; Data analysis; Defense industry; Life estimation; Life testing; Mechanical systems; Microelectromechanical devices; Micromechanical devices; Packaging;
Conference_Titel :
Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
Print_ISBN :
0-7803-8803-8
DOI :
10.1109/RELPHY.2005.1493104
