1651634

The influence of the package environment on the functioning and reliability of RF-MEMS switches

Van Spengen, W. Merlijn ; Czarnecki, P. ; Puers, Robert ; Van Beek, Joost T M ; De Wolf, Ingrid

IMEC, Leuven, Belgium

2005

337

341

electronics packaging; humidity; microswitches; nitrogen; reliability; stiction; vibrations; MEMS package environment; N₂; ambient air environment humidity; capacitive RF-MEMS switches; insulator charge trapping; package internal gas; package internal pressure; switch bridge stiction; switch functioning; switch lifetime; switch reliability; switching speed; vibration effects; Bridge circuits; Conductors; Coplanar waveguides; Humidity; Micromechanical devices; Packaging; Protection; Radiofrequency microelectromechanical systems; Switches; Temperature;

English

ieee

Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International

0-7803-8803-8

conf

10.1109/RELPHY.2005.1493108

1493108