• DocumentCode
    1651634
  • Title

    The influence of the package environment on the functioning and reliability of RF-MEMS switches

  • Author

    Van Spengen, W. Merlijn ; Czarnecki, P. ; Puers, Robert ; Van Beek, Joost T M ; De Wolf, Ingrid

  • Author_Institution
    IMEC, Leuven, Belgium
  • fYear
    2005
  • Firstpage
    337
  • Lastpage
    341
  • Keywords
    electronics packaging; humidity; microswitches; nitrogen; reliability; stiction; vibrations; MEMS package environment; N2; ambient air environment humidity; capacitive RF-MEMS switches; insulator charge trapping; package internal gas; package internal pressure; switch bridge stiction; switch functioning; switch lifetime; switch reliability; switching speed; vibration effects; Bridge circuits; Conductors; Coplanar waveguides; Humidity; Micromechanical devices; Packaging; Protection; Radiofrequency microelectromechanical systems; Switches; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
  • Print_ISBN
    0-7803-8803-8
  • Type

    conf

  • DOI
    10.1109/RELPHY.2005.1493108
  • Filename
    1493108
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1651634