Title :
All inkjet printed self-aligned transistors and circuits applications
Author :
Tseng, Huai-Yuan ; Subramanian, Venkatachalam
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA, USA
Abstract :
We fabricate devices and circuit blocks using a novel, fully-printed transistor process that self-aligns source/drain electrodes to gates, resulting in improved overlap capacitance. These are used with a self-aligned interconnect to realize fully-printed transistor arrays and inverters showing performance suitable for use in a range of low-cost electronics applications.
Keywords :
ink jet printing; integrated circuit interconnections; transistors; circuits applications; drain electrodes; fully-printed transistor arrays; inkjet printing; self-aligned interconnect; self-aligned transistors; source electrodes; Capacitance; Dielectric substrates; Electrodes; Ink; Insulation; Integrated circuit interconnections; Inverters; Pentacene; Printing; Silver;
Conference_Titel :
Electron Devices Meeting (IEDM), 2009 IEEE International
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4244-5639-0
Electronic_ISBN :
978-1-4244-5640-6
DOI :
10.1109/IEDM.2009.5424343
