• DocumentCode
    1653046
  • Title

    Exponential dependence of percolation resistance on gate voltage and its impacts on progressive breakdown

  • Author

    Lo, V.L. ; Pey, K.L. ; Tung, C.H. ; Ang, D.S. ; Tang, L.J.

  • Author_Institution
    Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
  • fYear
    2005
  • Firstpage
    602
  • Lastpage
    603
  • Keywords
    MOSFET; dielectric thin films; percolation; semiconductor device breakdown; MOSFET; catastrophic failure; gate dielectric defect density; localized heating; parasitic resistances; percolation resistance degradation; percolation resistance gate voltage dependence; progressive breakdown hardness; ultrathin gate dielectrics; Breakdown voltage; Degradation; Dielectric breakdown; Dielectric substrates; Electric resistance; Electrical resistance measurement; Leakage current; MOSFETs; Microelectronics; Stress measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
  • Print_ISBN
    0-7803-8803-8
  • Type

    conf

  • DOI
    10.1109/RELPHY.2005.1493163
  • Filename
    1493163