DocumentCode
1653078
Title
Device degradation model for stacked-ONO gate structure with using sonos and MOS transistors
Author
Yi, Jeong-Hyong ; Jin-Hong Ahn ; Shin, Hyungcheol ; Park, Young-lune ; Min, Hong Shick
Author_Institution
Sch. of Electr. Eng. & Comput. Sci. & NSI-NCRC, Seoul Nat. Univ., South Korea
fYear
2005
Firstpage
604
Lastpage
605
Keywords
MOSFET; charge injection; impact ionisation; interface states; leakage currents; semiconductor device models; tunnelling; Fowler-Nordheim stress; MOS transistors; SONOS transistor degradation rate; anode hole injection; anode holes tunneling; device degradation model; electron tunneling; gate leakage current; hole fluence; impact ionization; interface trap density; polarity dependence; single-oxide gate structures; stacked-ONO gate structure; Anodes; CMOS technology; Degradation; Electron traps; MOSFETs; Nonvolatile memory; SONOS devices; Silicon; Stress; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
Print_ISBN
0-7803-8803-8
Type
conf
DOI
10.1109/RELPHY.2005.1493164
Filename
1493164
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