Title :
ESD protection window targeting using LDMOS-SCR devices with PWELL-NWELL super-junction
Author :
Vashchenko, V.A. ; Beek, M. Ter
Author_Institution :
Nat. Semicond. Corp., Santa Clara, CA, USA
Keywords :
CMOS analogue integrated circuits; bipolar analogue integrated circuits; electrostatic discharge; protection; quantum well devices; semiconductor quantum wells; thyristors; CMOS process regions; ESD protection window targeting; LDMOS-SCR devices; PWELL-NWELL super-junction; breakdown voltage; discrete power devices; extended drain; extended voltage lateral BJT devices; nonself-aligned devices; self-aligned lateral DMOS devices; triggering characteristics; CMOS process; Costs; Current measurement; Electrostatic discharge; Pins; Protection; Pulse measurements; Testing; Thyristors; Voltage;
Conference_Titel :
Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
Print_ISBN :
0-7803-8803-8
DOI :
10.1109/RELPHY.2005.1493168