Title :
Fabrication of high-Q microresonators using femtosecond laser micromachining
Author :
Tada, Kazunari ; Cohoon, Gregory ; Kieu, Khanh ; Mansuripur, Masud ; Norwood, Robert A.
Author_Institution :
Coll. of Opt. Sci., Univ. of Arizona, Tucson, AZ, USA
Abstract :
We report a novel technique to fabricate microdisk resonators using femtosecond laser micromachining. The resonators had suppressed higher order modes with a measured Q-factor as high as 7.8 × 106.
Keywords :
Q-factor; laser materials processing; microcavities; micromachining; micromechanical resonators; Q-factor; femtosecond laser micromachining; high-Q microresonators; higher order modes; microdisk resonators; Fiber lasers; Laser modes; Microcavities; Optical fibers; Q factor; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
