Chemically-milled UHF SC-cut resonators

Author

Smythe, R.C. ; Angove, R.B.

Author_Institution

Piezo Technol. Inc., Orlando, FL, USA

fYear

1988

Firstpage

73

Lastpage

77

Abstract

Fundamental mode SC-cut resonators with potential for oscillator and filter applications have been developed at 333 MHz, 500 MHz, and 1 GHz using chemical milling to form a ring-supported structure. A novel electrode configuration which eliminates registration problems is used. At 333 MHz, Q values are typically 30×10³; the best Q obtained is 34.9×10³. At 1 GHz, a Q value of 10.2×10³ has been measured. Equivalent circuit parameters, frequency-temperature characteristics nonlinear resonance data, and acceleration sensitivity measurements are reported

Keywords

Q-factor; crystal resonators; etching; quartz; 333 to 1000 MHz; Q values; Q-factor; SC-cut resonators; SiO₂ resonators; UHF; acceleration sensitivity measurements; chemical milling; electrode configuration; eliminates registration problems; frequency-temperature characteristics; fundamental mode; nonlinear resonance data; ring-supported structure; Accelerometers; Chemicals; Electrodes; Equivalent circuits; Milling; Q measurement; Resonance; Resonant frequency; Resonator filters; Ring oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1988., Proceedings of the 42nd Annual

Conference_Location

Baltimore, MD

Type

conf

DOI

10.1109/FREQ.1988.27582

Filename

27582