• DocumentCode
    1654111
  • Title

    Novel test strategy for statistical evaluation of defect density and reliability of contacts and VIAS

  • Author

    Cabrini, A. ; Cantarelli, D. ; Cappelletti, P. ; Casiraghi, R. ; Iezzi, D. ; Lombardi, C. ; Maurelli, A. ; Pasotti, M. ; Roland, P.L. ; Torelli, G.

  • Author_Institution
    Dipt. di Elettronica, Pavia Univ., Italy
  • fYear
    2005
  • Firstpage
    678
  • Lastpage
    679
  • Keywords
    failure analysis; integrated circuit interconnections; integrated circuit reliability; integrated circuit testing; integrated circuit yield; statistical testing; defect density evaluation; failure analysis; interconnect contacts; interconnect reliability; interconnect vias; process yield; resistive contacts/vias; statistical IC test strategy; Condition monitoring; Decoding; Electrical resistance measurement; Failure analysis; Read only memory; Research and development; Semiconductor device measurement; Statistical analysis; Statistical distributions; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. 2005 IEEE International
  • Print_ISBN
    0-7803-8803-8
  • Type

    conf

  • DOI
    10.1109/RELPHY.2005.1493201
  • Filename
    1493201
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1654111