DocumentCode
1654131
Title
New Monte Carlo simulation for polycrystalline silicon thin-film transistor
Author
Shimatani, Tamio ; Koyanagi, Mitsumasa
Author_Institution
Fac. of Eng., Tohoku Univ., Sendai, Japan
fYear
1995
Firstpage
297
Lastpage
300
Abstract
The conduction mechanism in poly-Si TFT is investigated in detail using a new device simulator based on the Monte Carlo method. In this simulator, the influences of grain boundaries on the electrical conduction are represented by the grain boundary traps. The potential barriers are formed at the grain boundaries by the trapped electrons. The conduction electrons are repelled by these potential barriers and the current flow decreases. It is found from the simulation results that these potential barriers are reduced more significantly near the poly-Si-gate oxide interface and consequently the current flow is confined near the interface when a high gate voltage is applied. It also turns out that holes generated by the impact ionization significantly influence the channel electron conduction through reducing the barrier height at the grain boundary. This effect is the origin of the avalanche induced short channel effect in poly-Si TFT
Keywords
Monte Carlo methods; electron traps; grain boundaries; impact ionisation; semiconductor device models; silicon; thin film transistors; Monte Carlo simulation; Si; avalanche induced short channel effect; electrical conduction; grain boundary traps; impact ionization; poly-Si-gate oxide interface; polycrystalline silicon thin-film transistor; potential barriers; Acoustic scattering; Electron traps; Flowcharts; Grain boundaries; Grain size; Impact ionization; Optical scattering; Particle scattering; Silicon; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location
Washington, DC
ISSN
0163-1918
Print_ISBN
0-7803-2700-4
Type
conf
DOI
10.1109/IEDM.1995.499200
Filename
499200
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