Comparison of experimental and theoretical results of room temperature operated single electron transistor made by STM/AFM nano-oxidation process

Author

Matsumoto, Kazuhiko ; Ishii, Masami ; Shirakashi, Jun-ichi ; Segawa, Kazuhito ; Oka, Yasushi ; Vartanian, Bartev J. ; Harris, James S.

Author_Institution

Electrotech. Lab., MITI, Tsukuba, Japan

fYear

1995

Firstpage

363

Lastpage

366

Abstract

The experimental results of the single electron transistor (SET) operated at room temperature, which was fabricated by a scanning tunneling microscope (STM)/an atomic force microscope (AFM) nano-oxidation process, was compared with the results of calculated values, and a good coincidence between them was obtained. This coincidence confirms the existence of the Coulomb blockade phenomena in our SET even at room temperature

Keywords

atomic force microscopy; nanotechnology; oxidation; quantum interference phenomena; scanning tunnelling microscopy; single electron transistors; tunnel transistors; Coulomb blockade phenomena; STM/AFM nano-oxidation process; atomic force microscope; room temperature operation; scanning tunneling microscope; single electron transistor; Atomic force microscopy; Diodes; Electric variables; Scanning electron microscopy; Single electron transistors; Substrates; Temperature dependence; Thermionic emission; Titanium; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1995. IEDM '95., International

Conference_Location

Washington, DC

ISSN

0163-1918

Print_ISBN

0-7803-2700-4

Type

conf

DOI

10.1109/IEDM.1995.499215

Filename

499215