Title :
Design and Simulation of an Integrated Metal Oxide Based Micro NO2 Gas Sensor
Author :
Li, Ling-Han ; Dao, Dzung Viet ; Sugiyama, Susumu
Author_Institution :
Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kusatsu
Abstract :
In this paper, a novel design of metal-oxide NO2 gas sensor integrated with micro heaters is presented. This gas sensor is ultra small, with the size of 500mumtimes500mum. It has low power consumption less than 10 mW and high sensitivity up to 0.1ppm. The structure of gas sensor was designed, and computer-aided multi-physic simulations were carried out to analyze and optimize the performance of the gas sensor. Then the sensing circuit is designed and simulated. Finally, the fabrication process of the sensor is discussed
Keywords :
circuit simulation; gas sensors; integrated circuit design; nitrogen compounds; 250000 micron; 500 micron; NO2; computer-aided multiphysics simulation; fabrication process; integrated metal oxide; micro gas sensor; micro heaters; power consumption; sensing circuit design; Circuit simulation; Computational modeling; Computer simulation; Electrodes; Energy consumption; Gas detectors; Gas insulation; Substrates; Temperature sensors; Thermal sensors; Computer-aided simulation; NO2 sensor; metal oxide gas sensor; micro heater; thin film WO3;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2006 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
1-4244-0717-6
Electronic_ISBN :
1-4244-0718-1
DOI :
10.1109/MHS.2006.320315
