Fabrication of InGaAs quantum nanodisks array by using bio-template and top-down etching processes

Author

Yoshikawa, Kenichi ; Higo, Akio ; Lee, C.Y. ; Tamura, Yoshinobu ; Thomas, Cedric ; Kiba, Takayuki ; Ishii, Shin ; Sodabanlu, Hassanet ; Wang, Yannan ; Sugiyama, Masakazu ; Nakano, Yoshiaki ; Yamashita, Ichiro ; Murayama, Akihiro ; Samukawa, Seiji

Author_Institution

Inst. of Fluid Sci., Tohoku Univ., Sendai, Japan

fYear

2014

fDate

18-21 Aug. 2014

Firstpage

211

Lastpage

214

Abstract

III-V compound semiconductor quantum dot (QD) optical devices, such as high-power lasers and high-speed modulators, have great potential for the future of telecommunications and quantum cryptographic communication. We developed a top-down method for fabricating InGaAs quantum nanodisks (NDs) arrays by using bio-template and neutral beam etching (NBE) processes. Damage-free InGaAs/GaAs nano-pillar structures were successfully fabricated for the first time. After NBE, InGaAs NDs were embedded in the GaAs barrier layer by metalorganic vapor phase epitaxy. Subsequently, the photoluminescence was measured and the emission originating from the NDs could be directly detected.

Keywords

III-V semiconductors; MOCVD; etching; gallium arsenide; indium compounds; nanobiotechnology; nanofabrication; nanostructured materials; photoluminescence; semiconductor epitaxial layers; semiconductor growth; semiconductor quantum wells; vapour phase epitaxial growth; III-V compound semiconductor quantum dot optical devices; InGaAs-GaAs; barrier layer; biotemplate process; damage-free nanopillar structures; metalorganic vapor phase epitaxy; neutral beam etching process; photoluminescence; quantum nanodisks array; top-down etching processes; Etching; Fabrication; Gallium arsenide; Indium gallium arsenide; Quantum dot lasers; Substrates; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on

Conference_Location

Toronto, ON

Type

conf

DOI

10.1109/NANO.2014.6967975

Filename

6967975