DocumentCode
1654690
Title
Electrically-induced thermal stimuli forMEMS testing
Author
Dumas, N. ; Azais, F. ; Latorre, L. ; Nouet, P.
Author_Institution
Universite de Montpellier II
fYear
2004
Firstpage
60
Lastpage
65
Keywords
CMOS process; Costs; Electrical fault detection; Manufacturing; Micromachining; Micromechanical devices; Silicon; System testing; Temperature; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Symposium, 2004. ETS 2004. Proceedings. Ninth IEEE European
Print_ISBN
0-7695-2119-3
Type
conf
DOI
10.1109/ETSYM.2004.1347605
Filename
1347605
Link To Document