Title :
Grating couplers and ring resonator in aluminum nitride
Author :
Ghosh, Siddhartha ; Piazza, Gianluca
Author_Institution :
Dept. of Electr. & Syst. Eng., Univ. of Pennsylvania, Philadelphia, PA, USA
Abstract :
We report on the use of aluminum nitride (AlN) as an integrated photonic material. One-dimensional grating couplers, waveguides and rings are fabricated in 400 nm polycrystalline AlN films. Single couplers exhibit -6.6 dB peak insertion loss.
Keywords :
aluminium compounds; diffraction gratings; integrated optics; optical couplers; optical fabrication; optical films; optical materials; optical resonators; optical waveguides; AlN; insertion loss; integrated photonic material; loss -6.6 dB; one-dimensional grating couplers; polycrystalline films; ring resonator; size 400 nm; Couplers; Couplings; Gratings; Loss measurement; Optical fiber couplers; Optical ring resonators;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
