DocumentCode
1654759
Title
Mems built-in-self-test using MLS
Author
Dhayni, A. ; Mir, S. ; Rufer, L.
Author_Institution
TIMA Laboratory
fYear
2004
Firstpage
66
Lastpage
71
Keywords
Coupling circuits; Electrothermal effects; Micromechanical devices; Microstructure; Multilevel systems; System testing; Thermal conductivity; Thermal force; Thermal resistance; Thermomechanical processes;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Symposium, 2004. ETS 2004. Proceedings. Ninth IEEE European
Print_ISBN
0-7695-2119-3
Type
conf
DOI
10.1109/ETSYM.2004.1347607
Filename
1347607
Link To Document