Title :
In vivo real time imaging with micromachined based Dual-axes confocal microscope
Author :
Piyawattanametha, W. ; Mandella, M.J.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
Abstract :
We demonstrate a novel microelectromechanical systems (MEMS) based dual-axes confocal (DAC) microscope in a 10-mm diameter handheld package. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional (2-D) MEMS scanner that is actuated by self-aligned vertical comb actuators. The maximum DC optical scan angles are ±4.25° on the inner axis and ±1.5° on the outer axis, and the corresponding resonance frequencies are 3.4 kHz and 1.2 kHz. The maximum imaging rate is 5 frames/second. The miniature DAC microscope operating at 785-nm-wavelength achieves full-width-half-maximum (FWHM) transverse and axial resolutions of 4.2 ¿m and 7 ¿m, respectively.
Keywords :
micro-optomechanical devices; microactuators; micromechanical devices; optical microscopy; DC optical scan angles; barbell-shaped MEMS scanner; dual-axes confocal microscope; frequency 1.2 kHz; frequency 3.4 kHz; gimbaled MEMS scanner; handheld package; microelectromechanical systems; self-aligned vertical comb actuators; size 10 nm; size 4.2 mum; size 7 mum; two-dimensional MEMS scanner; wavelength 785 nm; Actuators; In vivo; Microelectromechanical systems; Micromechanical devices; Microscopy; Optical imaging; Packaging; Resonance; Resonant frequency; Two dimensional displays;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424439
