DocumentCode
165496
Title
Wet etching of different thickness c-Si wafers for light trapping improvement
Author
De Maria, A. ; La Ferrara, V. ; Bobeico, E. ; Della Noce, M. ; Lancellotti, L. ; Delli Veneri, Paola
Author_Institution
UTTP-MDB, ENEA - Portici Res. Center, Portici, Italy
fYear
2014
fDate
12-14 May 2014
Firstpage
1
Lastpage
3
Abstract
Surface texturing plays an important role to reduce light reflection and improve light confinement within silicon substrate thus resulting in solar cell efficiency enhancement. In this paper wet anisotropic texturing and subsequent wet isotropic smoothing of different thickness c-Si wafers are investigated to light trapping improvement. The influence of reagent concentration and etching time of the process smoothing are studied. The reflection properties of textured wafers, before and after smoothing steps, are monitored using UV-VIS spectrophotometer and the surface morphology images are acquired by scanning electron microscope.
Keywords
elemental semiconductors; etching; scanning electron microscopy; silicon; surface morphology; surface texture; ultraviolet spectra; visible spectra; Si; UV-visible spectrophotometer; c-Si wafers; etching time; light confinement; light reflection properties; light trapping; reagent concentration; scanning electron microscopy; silicon substrate; solar cell efficiency enhancement; surface morphology; surface texturing; textured wafers; wet anisotropic texturing; wet etching; wet isotropic smoothing; Hafnium; light trapping; smoothing; wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Technologies, 2014 Fotonica AEIT Italian Conference on
Conference_Location
Naples
Print_ISBN
978-8-8872-3718-4
Type
conf
DOI
10.1109/Fotonica.2014.6843905
Filename
6843905
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