Title :
Wet etching of different thickness c-Si wafers for light trapping improvement
Author :
De Maria, A. ; La Ferrara, V. ; Bobeico, E. ; Della Noce, M. ; Lancellotti, L. ; Delli Veneri, Paola
Author_Institution :
UTTP-MDB, ENEA - Portici Res. Center, Portici, Italy
Abstract :
Surface texturing plays an important role to reduce light reflection and improve light confinement within silicon substrate thus resulting in solar cell efficiency enhancement. In this paper wet anisotropic texturing and subsequent wet isotropic smoothing of different thickness c-Si wafers are investigated to light trapping improvement. The influence of reagent concentration and etching time of the process smoothing are studied. The reflection properties of textured wafers, before and after smoothing steps, are monitored using UV-VIS spectrophotometer and the surface morphology images are acquired by scanning electron microscope.
Keywords :
elemental semiconductors; etching; scanning electron microscopy; silicon; surface morphology; surface texture; ultraviolet spectra; visible spectra; Si; UV-visible spectrophotometer; c-Si wafers; etching time; light confinement; light reflection properties; light trapping; reagent concentration; scanning electron microscopy; silicon substrate; solar cell efficiency enhancement; surface morphology; surface texturing; textured wafers; wet anisotropic texturing; wet etching; wet isotropic smoothing; Hafnium; light trapping; smoothing; wet etching;
Conference_Titel :
Photonics Technologies, 2014 Fotonica AEIT Italian Conference on
Conference_Location :
Naples
Print_ISBN :
978-8-8872-3718-4
DOI :
10.1109/Fotonica.2014.6843905