DocumentCode
1655043
Title
Electric field sensors based on hybrid silicon and lithium niobate microring resonators
Author
Chen, Li ; Reano, Ronald M.
Author_Institution
Dept. of Electr. & Comput. Eng., Ohio State Univ., Columbus, OH, USA
fYear
2012
Firstpage
1
Lastpage
2
Abstract
We present electric field sensors based on the indirect bonding of thin films of lithium niobate to silicon microring resonators using benzocyclobutene as a bonding layer. The demonstrated sensitivity is 4.5 V m-1 Hz-1/2.
Keywords
electric field measurement; electro-optical devices; lithium compounds; micro-optics; microcavities; micromechanical resonators; organic compounds; ring lasers; benzocyclobutene; bonding layer; electric field sensors; hybrid silicon microring resonators; lithium niobate microring resonators; thin films; Electric fields; Lithium niobate; Optical fiber sensors; Optical films; Optical resonators;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-4673-1839-6
Type
conf
Filename
6325713
Link To Document