DocumentCode
1655072
Title
Feasibility of multimode polycrystalline waveguides/devices: Record low propagation loss and uniform 1×12 MMI fanout
Author
Kwong, David ; Covey, John ; Hosseini, Amir ; Zhang, Yang ; Chen, Ray T.
Author_Institution
Dept. of Comput. & Electr. Eng., Univ. of Texas at Austin, Austin, TX, USA
fYear
2012
Firstpage
1
Lastpage
2
Abstract
We investigate the loss dependence of multimode polysilicon waveguide widths, achieving a record low propagation loss of 3 dB/cm as well as demonstrating a low loss and high uniformity 1×12 multimode interference (MMI) beam splitter.
Keywords
light propagation; optical beam splitters; optical losses; optical materials; optical waveguides; silicon; Si; low propagation loss; multimode interference beam splitter; multimode polycrystalline waveguides; multimode polysilicon waveguide; polycrystalline device; Arrayed waveguide gratings; Optical losses; Optimized production technology; Photonics; Propagation losses; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-4673-1839-6
Type
conf
Filename
6325714
Link To Document