Title :
Backend monolithic integration of passive optical devices on 90nm bulk CMOS chip
Author :
Lee, Yoon Ho Daniel ; Lipson, Michal
Author_Institution :
Cornell Nanophotonics Group, Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate optical resonators and waveguides monolithically integrated on a CMOS die through post-backend processing. Both CMOS process integrity and optical performance are verified and measured.
Keywords :
CMOS integrated circuits; integrated optoelectronics; optical resonators; optical waveguides; CMOS die; CMOS process integrity; backend monolithic integration; bulk CMOS chip; optical resonators; optical waveguides; passive optical devices; post-backend processing; size 90 nm; CMOS integrated circuits; Electrical resistance measurement; Optical waveguides; Photonics; Semiconductor device measurement; Silicon; Temperature measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
