• DocumentCode
    1655155
  • Title

    3-D integration of silicon nitride on silicon-on-insulator platform

  • Author

    Li, Qing ; Eftekhar, Ali A. ; Atabaki, Amir H. ; Adibi, Ali

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We propose a new material platform using vertical integration of silicon nitride on silicon-on-insulator for optimizing device performances in silicon photonics. Preliminary results including silicon nitride growth, high-Q resonator fabrication, and vertical integration are presented.
  • Keywords
    Q-factor; integrated optics; optical fabrication; optical materials; optical resonators; silicon compounds; silicon-on-insulator; 3-D integration; SiN-Si; high-Q resonator fabrication; integrated photonic circuits; silicon nitride growth; silicon photonics; silicon-on-insulator; vertical integration; Absorption; Annealing; Couplings; Optical resonators; Silicon; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325717
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1655155