Title :
Ion beam doping of semiconductor nanowires
Author :
Borschel, C. ; Niepelt, R. ; Geburt, S. ; Ronning, C.
Author_Institution :
Inst. for Solid State Phys., Univ. of Jena, Germany
Abstract :
Semiconductor nanowires are of major importance within the area of nanotechnology, and are usually synthesized using the so-called vapor-liquid-solid mechanism. Controlled doping, a necessary issue in order to realize devices, is an unsolved problem and an extremely difficult task if using such a growth mechanism. We use an alternative route for modifying the electrical, optical and magnetic properties of semiconductor nanowires: ion implantation. Several independent studies on ion beam doping of semiconductor nanowires will be presented.
Keywords :
II-VI semiconductors; elemental semiconductors; ion implantation; manganese; nanowires; semiconductor doping; semiconductor quantum wires; silicon; thulium; zinc compounds; Si; ZnO:Tm; ZnS:Mn; electrical property; ion beam doping; ion implantation; magnetic property; optical property; semiconductor nanowires; vapor-liquid-solid mechanism; Annealing; Ion beams; Ion implantation; Iron alloys; Luminescence; Magnetic properties; Nanowires; Semiconductor device doping; Solids; Zinc oxide;
Conference_Titel :
Nanoelectronics Conference (INEC), 2010 3rd International
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-3543-2
Electronic_ISBN :
978-1-4244-3544-9
DOI :
10.1109/INEC.2010.5424451