DocumentCode
1655405
Title
Si/SiGe high-speed field-effect transistors
Author
Ismail, K.
Author_Institution
Dept. of Electron., Cairo Univ., Giza, Egypt
fYear
1995
Firstpage
509
Lastpage
512
Abstract
We review the current status of Si/SiGe n- and p-type MODFETs with an emphasis on their microwave performance. A comparison with state-of-the-art Si technology is given, and the potential use of Si/SiGe devices in complementary logic is pointed out
Keywords
CMOS integrated circuits; Ge-Si alloys; elemental semiconductors; high electron mobility transistors; microwave field effect transistors; silicon; Si-SiGe; Si/SiGe CMOS; Si/SiGe high-speed field-effect transistors; complementary logic; microwave performance; n-type MODFETs; p-type MODFETs; CMOS technology; Electron mobility; Epitaxial layers; FETs; Germanium silicon alloys; HEMTs; Logic devices; MODFETs; Microwave devices; Silicon germanium;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1995. IEDM '95., International
Conference_Location
Washington, DC
ISSN
0163-1918
Print_ISBN
0-7803-2700-4
Type
conf
DOI
10.1109/IEDM.1995.499249
Filename
499249
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