Developing Dexterous Bilateral Nanomanipulation System using Haptic Interface

To build complex 3D nano device such as nano scale force sensor or actuators, it requires dexterous 3D nanoassembly technology adding to 2D microfabrication or self-assembly of nano particles. We have two nanomanipulators which can be also setup either inside scanning electro microscope and optical microscope. Using multiple nanomanipulators, human-friendly haptic interface, and electro statically actuated MEMS micro gripper, 3D nanoassembly can be realized. By functionalizing tips in each nanomanipulator, a complex nanoassembly work can be done in a simplified manner. We adopt two nanomanipulators and electromagnetically functionalized probe tip and glue functionalized tip