Title :
Magnetically active polymeric nanocomposites for two-photon stereolithography
Author :
Guerrieri, Sara ; Qualtieri, A. ; Quarta, Alessandra ; Nitti, Simone ; Sileo, Leonardo ; Malvindi, Maria Ada ; Petroni, Simona ; Pellegrino, Teresa ; De Vittorio, M. ; Pisanello, Ferruccio
Author_Institution :
Center for Biomol. Nanotechnol.@UniLe, Ist. Italiano di Tecnol., Arnesano, Italy
Abstract :
We report about the realization of a negative-tone photoresist for two-photon lithography containing superparamagnetic iron-oxide nanoparticles at 0.1 wt.% concentration. The material was characterized in terms of optical transparence in the visible spectral range and the microfabrication process engineered in order to minimize particles agglomeration. The versatility of two-photon direct laser writing allowed us to fabricate three-dimensional structures with sub-micrometer resolution, letting us envision possible applications of this nanocomposite blend for the realization of complex magnetically actuated MEMS.
Keywords :
microfabrication; micromechanical devices; photoresists; stereolithography; superparamagnetism; complex magnetically-actuated MEMS; magnetically active polymeric nanocomposites; microfabrication process; nanocomposite blend; negative-tone photoresist; optical transparence; particle agglomeration minimization; submicrometer resolution; superparamagnetic iron-oxide nanoparticles; three-dimensional structure fabrication; two-photon direct laser writing; two-photon stereolithography; visible spectral range; Lithography; Nanoparticles; Optical device fabrication; Polymers; Resists;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on
Conference_Location :
Toronto, ON
DOI :
10.1109/NANO.2014.6968025
