• DocumentCode
    165559
  • Title

    Magnetically active polymeric nanocomposites for two-photon stereolithography

  • Author

    Guerrieri, Sara ; Qualtieri, A. ; Quarta, Alessandra ; Nitti, Simone ; Sileo, Leonardo ; Malvindi, Maria Ada ; Petroni, Simona ; Pellegrino, Teresa ; De Vittorio, M. ; Pisanello, Ferruccio

  • Author_Institution
    Center for Biomol. Nanotechnol.@UniLe, Ist. Italiano di Tecnol., Arnesano, Italy
  • fYear
    2014
  • fDate
    18-21 Aug. 2014
  • Firstpage
    92
  • Lastpage
    95
  • Abstract
    We report about the realization of a negative-tone photoresist for two-photon lithography containing superparamagnetic iron-oxide nanoparticles at 0.1 wt.% concentration. The material was characterized in terms of optical transparence in the visible spectral range and the microfabrication process engineered in order to minimize particles agglomeration. The versatility of two-photon direct laser writing allowed us to fabricate three-dimensional structures with sub-micrometer resolution, letting us envision possible applications of this nanocomposite blend for the realization of complex magnetically actuated MEMS.
  • Keywords
    microfabrication; micromechanical devices; photoresists; stereolithography; superparamagnetism; complex magnetically-actuated MEMS; magnetically active polymeric nanocomposites; microfabrication process; nanocomposite blend; negative-tone photoresist; optical transparence; particle agglomeration minimization; submicrometer resolution; superparamagnetic iron-oxide nanoparticles; three-dimensional structure fabrication; two-photon direct laser writing; two-photon stereolithography; visible spectral range; Lithography; Nanoparticles; Optical device fabrication; Polymers; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2014 IEEE 14th International Conference on
  • Conference_Location
    Toronto, ON
  • Type

    conf

  • DOI
    10.1109/NANO.2014.6968025
  • Filename
    6968025