Title :
Design of a Biochemistry Sensor Based on FAIMS Theory and Optimization Design Considering Brim-Effect of Electrical Field
Author :
Hua, Li ; Fei, Tang ; Wang Xiaohao ; Zhigang, Wang
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing
Abstract :
A biochemistry sensor based on FAIMS (field asymmetric mobility spectrometry) theory has been fabricated and characterized. The rectangular drift tube of FAIMS is 20x10x2 mm3 and is equipped with a plane-to-plane dielectric barrier discharge as the ionization source. The rectangular drift tube and ionization source were fabricated by MEMS technology with deposited metal films on glass substrates. At ambient pressure, the sensor was characterized by acetone and ethanol mixtures with nitrogen (99.99%) as carrier gas. The ability to separate ions was demonstrated by experiment. By the ANSYS software, the effects of parameters of drift tube, such as length, thickness, distance between rectangular drift tubes et al on brim-effect of electrical field were analyzed, which brings the theoretical foundation for the optimization design of the biochemistry sensor.
Keywords :
biosensors; chemical sensors; micromechanical devices; ANSYS software; FAIMS theory; MEMS technology; SiO2; acetone; biochemistry sensor; brim-effect; design optimization; ethanol; field asymmetric mobility spectrometry; glass substrates; ionization source; metal films; plane-to-plane dielectric barrier discharge; rectangular drift tube; Biosensors; Design optimization; Dielectric substrates; Electron tubes; Fault location; Gas detectors; Glass; Ionization; Micromechanical devices; Spectroscopy;
Conference_Titel :
Bioinformatics and Biomedical Engineering, 2008. ICBBE 2008. The 2nd International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1747-6
Electronic_ISBN :
978-1-4244-1748-3
DOI :
10.1109/ICBBE.2008.234
