Capacitance extraction of 3D multilayered and multi-conductor interconnects based on a new closed-form spatial Green´s function

A general and efficient technique is presented for deriving the closed-form Green´s functions of 2-D and 3-D Poisson equations in multilayered media. The spectral-domain transmission line model of the Green´s functions is adopted to facilitate the efficient application of the Krylov subspace order-reduction techniques for the analysis of transmission line systems. The accuracy and efficiency of the closed-form Green´s functions are demonstrated through its application to the capacitance extraction of a 3-D multilayered and multiconductor structures.