Three-dimensional imaging using digital holography and scanning electron microscopy

Author

Dardano, P. ; Ferrara, M.A. ; De Stefano, L. ; Coppola, Gianmarc ; Rea, I. ; De Tommasi, E. ; Rendina, I.

Author_Institution

Inst. for Microelectron. & Microsyst. (IMM), Naples, Italy

fYear

2014

fDate

12-14 May 2014

Firstpage

1

Lastpage

4

Abstract

In this work, we present a patented procedure that generates three dimensional (3D) image of a microscopic object with high definition, obtained by merging Scanning Electron Microscopy (SEM) and Digital Holography Microscopy (DHM) data. A high spatial resolution (up to r_z=λ/20, r_yx≅100nm) 3D model of the object is generated starting from two digital images, acquired separately, following standard characterization procedures. Then, the two set of data are combined using an original mathematical algorithm, which has been implemented with a commercially available software. The developed methodology is of broad interest and has been applied to elements of biological interest, in order to prove its features.

Keywords

biological techniques; holographic interferometry; optical microscopy; scanning electron microscopy; 3D object model; DHM; biological interest; commercially available software; digital holography microscopy data; digital images; high spatial resolution; microscopic object; original mathematical algorithm; patented procedure; scanning electron microscopy; standard characterization procedures; three-dimensional imaging; Biomedical optical imaging; Image resolution; Numerical models; Optical imaging; Optical microscopy; Scanning electron microscopy; 3D imaging; SEM imaging; digital holography;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics Technologies, 2014 Fotonica AEIT Italian Conference on

Conference_Location

Naples

Print_ISBN

978-8-8872-3718-4

Type

conf

DOI

10.1109/Fotonica.2014.6843975

Filename

6843975