Integrated micro-and nano optical cavities on a chip for supersensitive sensing

Integrated micro-and nano optical cavities are promising in electro photonic integration devices for their stable performance and compatible potential with optical-fiber technology as well as other electronic photonic integrated circuit. In this paper, we present an optimal design of SOI integrated optical cavities for supersensitive sensing under finite-difference time-domain (FDTD) modeling technique and beam propagation method (BPM). Phase match and coupling distance between the straight waveguide and the cavity are discussed. After showing the optical cavities fabricated with SOI, testing experiment was carried out, obtaining the transmitted spectrum in the near-infrared telecommunication bands. Analyzing transmission peaks using FWHM method, Q about 1000 is estimated. In the last part of this paper, the potential and promising prospective for supersensitive sensing is demonstrated.