Title :
Improvement of measurement accuracy of line-focus beam acoustic microscope system
Author :
Kobayashi, T. ; Kushibiki, J. ; Chubachi, N.
Author_Institution :
Dept. of Electr. Eng., Tohoku Univ., Sendai, Japan
Abstract :
Accurate velocity measurements of leaky surface acoustic waves (LSAWs) on the water/sample boundary with the line-focus-beam (LFB) acoustic microscope system are described. Some serious problems, such as temperature stabilization and mechanical precision, are experimentally discussed from the point of view of measurement accuracy. It is essential to stabilize the temperature around the system because the acoustic properties of water, used as a reference medium, depend on its temperature. The system is installed in a temperature-controlled room with 23±0.1°C. The influence of the movement errors on measurements is investigated by comparing the measured LSAW velocities with data obtained by the optical method. Experimental procedures to avoid the influence are established for accurate measurements
Keywords :
acoustic microscopes; measurement errors; surface acoustic waves; ultrasonic velocity measurement; 23 C; SAW velocity measurement; leaky surface acoustic waves; line-focus beam acoustic microscope system; measurement accuracy; mechanical precision; temperature stabilization; Acoustic beams; Acoustic measurements; Acoustic waves; Mechanical variables measurement; Microscopy; Optical surface waves; Surface acoustic waves; Temperature dependence; Velocity measurement; Water;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275903
