Title :
Tunneling acoustic microscopy
Author_Institution :
Hitachi Ltd., Saitama, Japan
Abstract :
A new type of acoustic microscopy related to scanning tunneling microscopy (STM) is described, i.e., tunneling acoustic microscopy (TAM). TAM combines STM with an acoustic technique. The principle is to measure interactions capable of generating fine strains in the STM sample. This is achieved with detection of an acoustic wave induced by modulating the interaction. The features of the STM are enhanced with no reduction in its ability, and the device permits nonconducting materials to be imaged
Keywords :
acoustic microscopy; atomic force microscopy; scanning tunnelling microscopy; atomic force detection; electrostatic force detection; fine strains; nonconducting materials; scanning tunneling microscopy; tunneling acoustic microscopy; Acoustic measurements; Acoustic signal detection; Acoustic waves; Capacitive sensors; Conducting materials; Electron microscopy; Electrostatics; Probes; Tunneling; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275906
