A calibration method of the LFB acoustic microscope system using isotropic standard specimens

Absolute accuracy of the line-focus beam (LFB) acoustic microscope system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, viz., the independent elastic constants and density, are measured with high accuracy. Three synthetic silica glass substrates from different manufacturers are taken as isotropic standard specimens. The LSAW propagation characteristics, measured at a frequency of 225 MHz, are compared with the calculated results, using the measured bulk acoustic properties