Title :
A calibration method of the LFB acoustic microscope system using isotropic standard specimens
Author :
Kushibiki, J. ; Wakahara, Toru ; Kobayashi, T. ; Chubachi, N.
Author_Institution :
Dept. of Electr. Eng., Tohoku Univ., Sendai, Japan
Abstract :
Absolute accuracy of the line-focus beam (LFB) acoustic microscope system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, viz., the independent elastic constants and density, are measured with high accuracy. Three synthetic silica glass substrates from different manufacturers are taken as isotropic standard specimens. The LSAW propagation characteristics, measured at a frequency of 225 MHz, are compared with the calculated results, using the measured bulk acoustic properties
Keywords :
acoustic microscopes; calibration; surface acoustic waves; ultrasonic velocity measurement; 225 MHz; SiO2; calibration method; isotropic standard specimens; leaky SAW attenuation; leaky SAW velocity; line-focus-beam acoustic microscope system; synthetic silica glass substrates; Acoustic beams; Acoustic measurements; Acoustic waves; Attenuation measurement; Calibration; Frequency measurement; Measurement standards; Microscopy; Surface acoustic waves; Velocity measurement;
Conference_Titel :
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-0562-0
DOI :
10.1109/ULTSYM.1992.275907
