Realization of high Tc superconducting microstrip filter for communication

Author

Dong-Chul Chung ; Huh, Won-II ; Han, Byoung-Sung

Author_Institution

Dept. of Electr. Eng., Chonbuk Nat. Univ., Chonju, South Korea

Volume

1

fYear

1997

Firstpage

585

Abstract

A high temperature superconductor microstrip filter at Ku-band was designed and fabricated. YBa₂Cu₃O_7-x epitaxial thin films were grown on MgO substrates by rf-sputtering deposition. The filter patterns on the YBa₂Cu₃O _7-x/MgO film were generated using conventional photolithography and EDTA etching. Experimental results for the YBa₂Cu₃O_7-x superconducting filter in terms of frequency response, frequency band, and other characteristics, were reported. The filter performance was superior to that of filters fabricated from Cu-metal films

Keywords

barium compounds; electron device manufacture; etching; frequency response; high-temperature superconductors; magnesium compounds; microstrip filters; photolithography; sputter deposition; superconducting device testing; superconducting epitaxial layers; superconducting microwave devices; vapour phase epitaxial growth; yttrium compounds; 12 GHz; EDTA etching; Ku-band; MgO; MgO substrates; YBa₂Cu₃O_7-x epitaxial thin films; YBa₂Cu₃O₇; filter patterns; frequency response; high temperature superconductor microstrip filter; photolithography; reflection parameter; rf-sputtering deposition; transmission parameter; Etching; Frequency response; High temperature superconductors; Lithography; Microstrip filters; Sputtering; Substrates; Superconducting films; Superconducting filters; Superconducting thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Properties and Applications of Dielectric Materials, 1997., Proceedings of the 5th International Conference on

Conference_Location

Seoul

Print_ISBN

0-7803-2651-2

Type

conf

DOI

10.1109/ICPADM.1997.617668

Filename

617668