Applications of microelectronics and microfabrication to ultrasound imaging systems

Author

Robinson, A.L. ; Mo, J.-H.

Author_Institution

Solid State Electron. Lab., Michigan Univ., Ann Arbor, MI, USA

fYear

1992

Firstpage

681

Abstract

Recent work on techniques for applying microelectronics and related microfabrication technology to different aspects of ultrasound imaging systems is described. Particular topics addressed include integrated transducer arrays, acoustic crosstalk, microelectronics for front-end interface circuits, microelectronic preamplifiers, microelectronic design flexibility, microfabrication techniques for 2-D arrays, and 3-D interconnects for 2-D arrays

Keywords

acoustic arrays; acoustic imaging; crosstalk; integrated circuit technology; micromechanical devices; ultrasonic transducers; 2-D arrays; 3-D interconnects; acoustic crosstalk; front-end interface circuits; integrated transducer arrays; microelectronic design flexibility; microelectronic preamplifiers; microelectronics; microfabrication; monolithic approach; piezopolymers; substrate micromachining; ultrasound imaging systems; Acoustic arrays; Acoustic imaging; Acoustic transducers; Crosstalk; Flexible printed circuits; Integrated circuit technology; Microelectronics; Preamplifiers; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1992. Proceedings., IEEE 1992

Conference_Location

Tucson, AZ

Print_ISBN

0-7803-0562-0

Type

conf

DOI

10.1109/ULTSYM.1992.275914

Filename

275914