• DocumentCode
    1656592
  • Title

    Stamp printing of silicon nanomembrane based flexible photonic devices

  • Author

    Xu, Xiaochuan ; Subbaraman, Harish ; Hosseini, Amir ; Kwong, David ; Lin, Che-Yun ; Chen, Ray T.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate for the first time stamp printing of silicon nanomembrane based photonic devices onto flexible substrate utilizing protection layer and suspended configuration. The propagation loss of the transferred waveguide is ~1.1dB/cm.
  • Keywords
    elemental semiconductors; integrated optics; light propagation; nanophotonics; optical waveguides; printing; silicon; Si; nanomembrane based flexible photonic devices; propagation loss; stamp printing; transferred waveguide; Etching; Loss measurement; Optical waveguides; Photonics; Printing; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325772
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1656592