Title :
Quartz tuning-fork type AFM probe operated in Anti-phase Vibration Mode
Author :
Hida, Hirotaka ; Shikida, Mitsuhiro ; Fukuzawa, Kenji ; Ono, Atsushi ; Sato, Kiminori ; Asaumi, K. ; Iriye, Y.
Author_Institution :
Dept. of Micro-Nano Syst. Eng.,, Nagoya Univ.
Abstract :
This paper presents that quartz tuning fork shows excellent properties as atomic force microscopy (AFM) probe. We used focused ion beam (FIB) system to monolithically form a sharp tip at the side end of one beam. The fabricated probe can vibrate and detect the deformation itself because of piezoelectric property of crystal quartz. We evaluated the vibration characteristic and the self-detection ability of tuning fork. The tuning fork probe is actuated in two different vibration mode; in-phase and anti-phase mode, and clarified that high Q-factor of 5247 was obtained in anti-phase mode. We further applied this mode for AFM observation and images were successfully with dynamic AFM system
Keywords :
atomic force microscopy; focused ion beam technology; piezoelectricity; probes; quartz; vibration measurement; AFM probe; antiphase vibration mode; atomic force microscopy; crystal quartz; focused ion beam system; piezoelectric property; quartz tuning-fork; tuning fork probe; vibration characteristic; Atomic force microscopy; Electrodes; Force measurement; Ion beams; Microelectromechanical devices; Probes; Q factor; Resonant frequency; Springs; Vibration measurement;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2006 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
1-4244-0717-6
Electronic_ISBN :
1-4244-0718-1
DOI :
10.1109/MHS.2006.320245
